Yuheng Wang

Integrated bake/chill system for across-wafer temperature uniformity control in photoresist processing

Hui Tong Chua, H. Chua, Yuheng Wang, 2009 .

Temperature Cycling for Photoresist Processing

Arthur Tay, Zhong Ping Fang, Hui Tong Chua, 2008 .

Equipment design and control of advanced thermal processing system in lithography

Hui Tong Chua, A. Tay, H. Chua, 2007, IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society.

Thickness dependence of properties of ZnO:Ga films deposited by rf magnetron sputtering

Jin Ma, Feng Ji, Honglei Ma, 2005 .

Influence of annealing on the properties of ZnO:Ga films prepared by radio frequency magnetron sputtering

Jin Ma, Xijian Zhang, Feng Ji, 2005 .