Tsukasa Hori

发表

Performance of new high-power HVM LPP-EUV source

Tsuyoshi Yamada, Tamotsu Abe, Hiroshi Tanaka, 2016, SPIE Advanced Lithography.

Development of high-power ArF/F2 laser platform for VUV microlithography

Tatsuya Ariga, Hakaru Mizoguchi, Akira Sumitani, 2004, SPIE Advanced Lithography.

Scenario Analysis of the Diffusion of Fuel Cells in the Residential Sector

Yasushi Umeda, Shinichi Fukushige, Yusuke Kishita, 2014 .

Update of the development progress of the high power LPP-EUV light source using a magnetic field

Shinji Nagai, Yoshifumi Ueno, Georg Soumagne, 2019, Photomask Technology.

ICOPE-15-1020 Hampson type heat-exchanger technology and economic evaluation for LNG re-gasification and power generation At LNG receiving terminals

Yoshinori Hisazumi, Tsukasa Hori, Akeshi Kegasa, 2015 .

High power LPP-EUV source with long collector mirror lifetime for high volume semiconductor manufacturing

Tsuyoshi Yamada, Tamotsu Abe, Hiroshi Tanaka, 2018, 2018 China Semiconductor Technology International Conference (CSTIC).

Key components technology update of the 250W high-power LPP-EUV light source

Tamotsu Abe, Hiroshi Tanaka, Hiroaki Nakarai, 2017, Advanced Lithography.

First generation laser-produced plasma source system for HVM EUV lithography

Hiroshi Komori, Akira Sumitani, Tamotsu Abe, 2010, Advanced Lithography.

High-power LPP-EUV source with long collector mirror lifetime for high volume semiconductor manufacturing

Tsuyoshi Yamada, Hiroshi Tanaka, Hiroaki Nakarai, 2018, Advanced Lithography.

Performance of a highly stable 2-kHz operation KrF laser

Tatsuya Ariga, Masaki Nakano, Akira Sumitani, 1999, Advanced Lithography.

Challenge of >300W high power LPP-EUV source with long collector mirror lifetime for semiconductor HVM

Georg Soumagne, Tsuyoshi Yamada, Tamotsu Abe, 2020, Advanced Lithography.

Challenge of high power LPP-EUV source with long collector mirror lifetime for semiconductor HVM

Georg Soumagne, Tsuyoshi Yamada, Hiroshi Tanaka, 2019, Photomask Technology.

Beam quality of a new-type MOPO laser system for VUV laser lithography

Tatsuya Ariga, Hakaru Mizoguchi, Akira Sumitani, 2004, SPIE Advanced Lithography.

Performance of 250W high-power HVM LPP-EUV source

Tsuyoshi Yamada, Tamotsu Abe, Hiroshi Tanaka, 2017, Advanced Lithography.

Performance of one hundred watt HVM LPP-EUV source

Georg Soumagne, Tsuyoshi Yamada, Tamotsu Abe, 2015, Advanced Lithography.

Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography

Tamotsu Abe, Junichi Fujimoto, Hiroaki Nakarai, 2012, Advanced Lithography.

Sub-hundred Watt operation demonstration of HVM LPP-EUV source

Tsuyoshi Yamada, Tamotsu Abe, Hiroshi Tanaka, 2014, Advanced Lithography.

Feasibility study of 6 kHz ArF excimer laser for 193 nm immersion lithography

Akira Sumitani, Osamu Wakabayashi, Hakaru Mizoguchi, 2004, SPIE Advanced Lithography.

100W 1st generation laser-produced plasma light source system for HVM EUV lithography

Georg Soumagne, Akira Sumitani, Takashi Suganuma, 2011, Advanced Lithography.

Exergy Design of Energy Conversion System Using Internet Technology

Yoshinori Hisazumi, Tsukasa Hori, Tsutomu Wakabayashi, 2012 .

4815 New Photographic Method of Unsteady Spray by Use of Large Format Film and High-Magnified Projector

Tsukasa Hori, Hiroki Nakagawa, Hajime Fujimoto, 2006 .

100W EUV light-source key component technology update for HVM

Takeshi Okamoto, Tamotsu Abe, Hiroshi Tanaka, 2016, SPIE Advanced Lithography.

Key components technology update of 100W HVM EUV source

Takeshi Okamoto, Tamotsu Abe, Hiroshi Tanaka, 2015, Advanced Lithography.

MS2-2: Large Eddy Simulation of Diesel Spray Flame using KIVA-LES with Flamelet Model and CIP Scheme(MS: Modeling and Simulation,General Session Papers)

Hiroshi Tanaka, Tsukasa Hori, Jiro Senda, 2008 .

Update of development progress of the high power LPP-EUV light source using a magnetic field

Shinji Nagai, Yoshifumi Ueno, Tamotsu Abe, 2020, Advanced Lithography.

Update of the development progress of the high power LPP-EUV light source using a magnetic field

Shinji Nagai, Takashi Saito, Hideyuki Hayashi, 2019, Advanced Lithography.

Key components development progress updates of the 250W high power LPP-EUV light source

Tamotsu Abe, Hiroshi Tanaka, Hiroaki Nakarai, 2017, Photomask Technology.

Key components development progress updates of the 250W high-power LPP-EUV light source

Yoshifumi Ueno, Tamotsu Abe, Hiroaki Nakarai, 2018, Advanced Lithography.

Effect of breakup model on large-eddy simulation of diesel spray evolution under high back pressures

Tsukasa Hori, Jiro Senda, Koji Kitaguchi, 2014 .

LPP-EUV light source development for high volume manufacturing lithography

Tsuyoshi Yamada, Tamotsu Abe, Hiroshi Tanaka, 2013, Advanced Lithography.

Development of 250W EUV light source for HVM lithography

Tamotsu Abe, Hiroshi Tanaka, Hiroaki Nakarai, 2017, 2017 China Semiconductor Technology International Conference (CSTIC).

Characterization and optimization of tin particle mitigation and EUV conversion efficiency in a laser produced plasma EUV light source

Georg Soumagne, Akira Endo, Akira Sumitani, 2011, Advanced Lithography.

Key components development progress of high-power LPP-EUV light source with unique debris mitigation system using a magnetic field

Shinji Nagai, Yoshifumi Ueno, Georg Soumagne, 2018, Photomask Technology.

Large Eddy Simulation of Non-Evaporative and Evaporative Diesel Spray in Constant Volume Vessel by Use of KIVALES

Tsukasa Hori, Jiro Senda, Hajime Fujimoto, 2006 .

Large Eddy Simulation of Diesel Spray Combustion with Eddy-Dissipation Model and CIP Method by Use of KIVALES

Tsukasa Hori, Jiro Senda, Hajime Fujimoto, 2007 .

Effect of Convective Schemes on LES of Fuel Spray by Use of KIVALES

Tsukasa Hori, Jiro Senda, Hajime Fujimoto, 2008 .

Visualization of Micro Structure in a Diesel Spray by Use of Photography with High Spatial Resolution

Tsukasa Hori, Jiro Senda, Hiroki Nakagawa, 2008 .

Enthalpy and Exergy Analysis of Domestic Desiccant Air Conditioner With Cooling Dehumidification and Heating Humidification Using Process Simulator

Akira Kishimoto, Yoshinori Hisazumi, Tsukasa Hori, 2011 .

Energy Saving Effect of Novel Desiccant Air Conditioner for Zero Emission House

Akira Kishimoto, Yoshinori Hisazumi, Tsukasa Hori, 2012 .

Scenario building on the diffusion of fuel cell cogeneration systems for apartment houses

Yasushi Umeda, Shinichi Fukushige, Yusuke Kishita, 2015 .

Effect of Breakup Model on Diesel Spray Structure Simulated by Large Eddy Simulation

Tsukasa Hori, Jiro Senda, Hajime Fujimoto, 2009 .

Instantaneous and Statistical Structures of Non-Evaporative Diesel Spray

Tsukasa Hori, Jiro Senda, Hiroki Nakagawa, 2007 .