S. Zolgharnain

Electron beam technology-SEM to microcolumn

E. Kratschmer, M. G. R. Thomson, H. S. Kim, 1996 .

Micromachining applications of a high resolution ultrathick photoresist

Jane M. Shaw, Nancy C. LaBianca, S. A. Rishton, 1995 .

Experimental evaluation of a 20×20 mm footprint microcolumn

E. Kratschmer, M. G. R. Thomson, S. A. Rishton, 1996 .

Electron‐beam microcolumns for lithography and related applications

E. Kratschmer, M. G. R. Thomson, S. A. Rishton, 1996 .