Jérôme Perrin

4 – Reactor Design for a-Si: H Deposition

J. Perrin, Jérôme Perrin, 1995 .

Simulations of hydrogen releases from high pressure storage systems

Pierre Bénard, Jérôme Perrin, A. Hourri, 2006 .

Phenomenology of a dual-mode microwave/RF discharge used for the deposition of silicon oxide thin layers

J. Perrin, R. Etemadi, C. Godet, 1997 .

Surface reaction probabilities and kinetics of H, SiH3, Si2H5, CH3, and C2H5 during deposition of a-Si:H and a-C:H from H2, SiH4, and CH4 discharges

Jean Guillon, Masaharu Shiratani, J. Perrin, 1998 .

High rate etching of 4H-SiC using a SF6/O2 helicon plasma

Roderick Boswell, Pascal Chabert, R. Boswell, 2000 .