Takashi Hiroi

Automated Visual Inspection of LSI Wafer Multilayer Patterns Using a Derivative-Polarity Comparison Algorithm

Hitoshi Kubota, Shunji Maeda, Takashi Hiroi, 1999 .

Development of Solder Joint Inspection Method Using Air Stimulation Speckle Vibration Detection Method and Fluorescence Detection Method

Yasuo Nakagawa, Toshimitsu Hamada, Takanori Ninomiya, 1992, MVA.

Robust Pattern Registration Method using Plural Evaluation Functions for LSI Patterns

Masahiro Watanabe, Maki Tanaka, Chie Shishido, 2004 .

Compact 3-D Sensor for Robots Using X-Shaped Slit Light

Takanori Ninomiya, Takashi Hiroi, Nakagawa Yasuo, 1987 .

In-line e-beam inspection with optimized sampling and newly developed ADC

Masami Ikota, Munenori Fukunishi, Takashi Hiroi, 2003, SPIE Advanced Lithography.

Robust defect detection method using reference image averaging for high-throughput SEM wafer pattern inspection system

Hirohito Okuda, Takashi Hiroi, 2006, SPIE Advanced Lithography.

Automated visual inspection for LSI wafer patterns using a derivative-polarity comparison algorithm

Hitoshi Kubota, Shunji Maeda, Hiroshi Makihira, 1991, Optics & Photonics.

Robust and efficient image processing scheme for electron beam LSI wafer pattern inspection

Munenori Fukunishi, Takashi Hiroi, 2004, SPIE Advanced Lithography.

Precise visual inspection for LSI wafer patterns using subpixel image alignment

Yasuo Nakagawa, Kenji Watanabe, Hitoshi Kubota, 1994, Proceedings of 1994 IEEE Workshop on Applications of Computer Vision.

Pattern alignment method based on consistency among local registration candidates for LSI wafer pattern inspection

Masahiro Watanabe, Chie Shishido, Takashi Hiroi, 2002, Sixth IEEE Workshop on Applications of Computer Vision, 2002. (WACV 2002). Proceedings..

Solder Joint Inspection Using Air Stimulation Speckle Vibration Detection Method and Fluorescence Detection Method (Special Section on Machine Vision Applications)

Toshimitsu Hamada, Takanori Ninomiya, Takashi Hiroi, 1993 .