Jun Kawakami

Shearing interferometry for at wavelength wavefront measurement of extreme-ultraviolet lithography projection optics

Kazuya Ota, Masanobu Hasegawa, Akiyoshi Suzuki, 2003 .

Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography.

Masanobu Hasegawa, Akiyoshi Suzuki, Masahito Niibe, 2007, Applied optics.

EUVA’s challenges toward 0.1nm accuracy in EUV at-wavelength interferometry

Masanobu Hasegawa, Akiyoshi Suzuki, Mitsuo Takeda, 2006 .

Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers

Kazuya Ota, Masanobu Hasegawa, Akiyoshi Suzuki, 2004 .