Adam Urbanowicz

Effect of Porogen Residue on Chemical, Optical, and Mechanical Properties of CVD SiCOH Low-k Materials

Denis Shamiryan, Stefan De Gendt, Kris Vanstreels, 2009 .

Nanoindentation study of thin plasma enhanced chemical vapor deposition SiCOH low-k films modified in He/H2 downstream plasma

Kris Vanstreels, K. Vanstreels, Adam Urbanowicz, 2010 .

Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening

Denis Shamiryan, S. De Gendt, Kris Vanstreels, 2010 .