J Ihlemann

Excimer laser micro machining: fabrication and applications of dielectric masks

J Ihlemann, K Rubahn, 2000 .

Fabrication of diffractive phase elements for the UV-range by laser ablation patterning of dielectric layers

J Ihlemann, D Schäfer, 2002 .

Optimization of a beam delivery system for a short-pulse KrF laser used for material ablation.

J Ihlemann, P Simon, P Dainesi, 1997, Applied optics.

Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulses

J. Ihlemann, P. Simon, J Ihlemann, 1997 .