Yujiro Hikida

Latest performance of ArF immersion scanner NSR-S630D for high-volume manufacturing for 7nm node

Takayuki Funatsu, Yuichi Shibazaki, Akira Hayakawa, 2015, Advanced Lithography.

On-product overlay improvement with an enhanced alignment system

Yuichi Shibazaki, Masahiro Morita, Hajime Yamamoto, 2017, Advanced Lithography.

Enhancement of ArF immersion scanner system for advanced device node manufacturing

Yuichi Shibazaki, Yujiro Hikida, Noriaki Kasai, 2018, Advanced Lithography.