M. Waelti

Two-axis single-crystal silicon micromirror arrays

C. Mastrangelo, M. Dokmeci, C. Fung, 2004, Journal of Microelectromechanical Systems.

Electromagnetically actuated mirror arrays for use in 3-D optical switching applications

C. Corcoran, A. Pareek, M. Waelti, 2004, Journal of Microelectromechanical Systems.

Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodes

H. Sane, C.H. Mastrangelo, M. Waelti, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Single-crystal silicon micromirror array with polysilicon flexures

Carlos H. Mastrangelo, Clifford D. Fung, C. Mastrangelo, 2005 .

Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array

Christian Menolfi, Oliver Paul, Qiuting Huang, 2001 .

Bulk micromachined electrostatic beam steering micromirror array

C.H. Mastrangelo, M.R. Dokmeci, A. Pareek, 2002, IEEE/LEOS International Conference on Optical MEMs.

Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

C.H. Mastrangelo, A. Pareek, M. Waelti, 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.