Bernard Legrand

发表

12 years of resonator: From telephone to atomic force microscopy

Lionel Buchaillot, Bernard Legrand, Marc Faucher, 2011, 2011 International Symposium on Micro-NanoMechatronics and Human Science.

Optimization of SiNX: H films deposited by PECVD for reliability of electronic, microsystems and optical applications

E. Herth, Lionel Buchaillot, Bernard Legrand, 2010, Microelectron. Reliab..

IF MEMS filters for mobile communication

Denis Flandre, E. Quevy, Andreas Kaiser, 2001, ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597).

Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution

Lionel Buchaillot, Bernard Legrand, Marc Faucher, 2013, Int. J. Intell. Mechatronics Robotics.

Reliability of polycrystalline MEMS : prediction of the debugging-time

O. Millet, Dominique Collard, Lionel Buchaillot, 2004 .

A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection †

Lionel Buchaillot, Bernard Legrand, Marc Faucher, 2014, Sensors.

Electrostatic Actuators Operating in Liquid Environment : Suppression of Pull-in Instability and Dynamic Response pdf

Dominique Collard, Lionel Buchaillot, Bernard Legrand, 2007, ArXiv.

Architecture-level center frequency drift compensation method for micromechanical filters used in IF stages of wireless telecommunication receivers

Olivier Billoint, Andreas Kaiser, Dimitri Galayko, 2002, Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS.

Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes

Denis Lagrange, Nicolas Mauran, Bernard Legrand, 2021, IEEE Transactions on Control Systems Technology.

Influence of the Step Covering on Fatigue Phenomenon for Polycrystalline Silicon Micro-Electro-Mechanical-Systems (MEMS) : Instrumentation, Measurement, and Fabrication Technology

Dominique Collard, Lionel Buchaillot, Bernard Legrand, 2002 .

Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology

Andreas Kaiser, Dominique Collard, Dimitri Galayko, 2006 .

Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids

Dominique Collard, Lionel Buchaillot, Bernard Legrand, 2006 .

Electron beam nanolithography in AZnLOF 2020

Lionel Buchaillot, Bernard Legrand, Marc Faucher, 2010 .

Silicon surface nano-oxidation using scanning probe microscopy

Bernard Legrand, B. Legrand, D. Stiévenard, 2006 .

Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

B. Walter, Lionel Buchaillot, Bernard Legrand, 2009 .

Enhanced Spontaneous Emission by Quantum Boxes in a Monolithic Optical Microcavity

E. Costard, Jean-Michel Gérard, B. Sermage, 1998 .

MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution

L. Buchaillot, Bernard Legrand, Marc Faucher, 2013 .

Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope

Gilles Dambrine, Bernard Legrand, Damien Ducatteau, 2014, Nanotechnology.

The stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions

Dominique Collard, Lionel Buchaillot, Bernard Legrand, 2006 .