Robert Primig

c-axis inclined ZnO films for shear-wave transducers deposited by reactive sputtering using an additional blind

Omar Elmazria, Wolfram Wersing, Matthias Schreiter, 2006 .

Deposition of self-polarized PZT films by planar multi-target sputtering

Wolfram Wersing, Rainer Bruchhaus, Dana Pitzer, 1997 .

Electro-acoustic hysteresis behaviour of PZT thin film bulk acoustic resonators

Wolfram Wersing, Matthias Schreiter, Dana Pitzer, 2004 .

Sputtering of PZT thin films for surface micromachined IR-detector arrays

Wolfram Wersing, Rainer Bruchhaus, Matthias Schreiter, 1999 .

Novel integrated FBAR sensors: a universal technology platform for bio- and gas-detection

Wolfram Wersing, Matthias Schreiter, Heinz Zeininger, 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).

Pyroelectric Thin Film Presence Detector Arrays with Micromachined Pixels

G. Gerlach, Wolfram Wersing, Rainer Bruchhaus, 2002 .