A.R. Mirza

One micron precision, wafer-level aligned bonding for interconnect, MEMS and packaging applications

A.R. Mirza, 2000, 2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070).

Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection

S. Manalis, T. Burg, C. Tsau, 2006, Journal of Microelectromechanical Systems.