Shinji Kobayashi

Advancements in EUV Resist Materials and Processing

Koji Kaneyama, Daisuke Kawamura, Hiroaki Oizumi, 2009 .

EUV Resist Outgassing: Quantification and Release Mechanisms

Julius Joseph Santillan, Toshiro Itani, J. Santillan, 2008 .

Analysis of outgassing from EUV resists

Minoru Toriumi, Shinji Kobayashi, Julious Joseph Santillan, 2007 .

EUV resist outgassing release characterization and analysis

Julius Joseph Santillan, Toshiro Itani, Hiroaki Oizumi, 2009 .