T. Sano

Mach-Zehnder filter using multiple Si waveguide structure sections for width error tolerance

Munehiro Toyama, Miyoshi Seki, Hironori Sasaki, 2012 .

The impacts of ArF Excimer Immersion Lithography on Integrated Silicon Photonics Tech.

Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, 2012 .

Si wire array waveguide grating with parallel star coupler configuration fabricated by ArF excimer immersion lithography

Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, 2013 .