Xinxin Li

Maskless etching of three-dimensional silicon structures in KOH

Minhang Bao, Shaoqun Shen, M. Bao, 1996 .

Study on linearization of silicon capacitive pressure sensors

Minhang Bao, Shaoqun Shen, M. Bao, 1997 .

A novel technique for measuring etch rate distribution of Si

Minhang Bao, Shaoqun Shen, Dacheng Zhang, 2000 .

Study of deep silicon etching for micro-gyroscope fabrication

Jianmin Miao, Rongming Lin, Xinxin Li, 2001 .

A micromachined piezoresistive angular rate sensor with a composite beam structure

Minhang Bao, Shaoqun Shen, Deren Lu, 1999 .