G.K. Fedder

发表

A 4-bit RF MEMS phase shifter monolithically integrated with conventional CMOS

T. Mukherjee, J. Reinke, L. Wang, 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

Tri-axial high-g CMOS-MEMS capacitive accelerometer array

G.K. Fedder, A. Wung, R.V. Park, 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

CMOS–MEMS Lateral Electrothermal Actuators

Jingwei Liu, N. Sarkar, G.K. Fedder, 2008, Journal of Microelectromechanical Systems.

A direct plasma etch approach to high aspect ratio polymer micromachining with applications in bioMEMS and CMOS-MEMS

K. J. Gabriel, G. Fedder, J. Zahn, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

CMOS-based sensors

G. Fedder, G.K. Fedder, 2005, IEEE Sensors, 2005..

Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons

G. Fedder, M. Zaghloul, I. Voiculescu, 2005, IEEE Sensors Journal.

Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism

Fang Chen, G. Fedder, C.-C. Lo, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

A lateral capacitive CMOS accelerometer with structural curl compensation

G. Fedder, Huikai Xie, G.K. Fedder, 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

A CMOS-MEMS lateral-axis gyroscope

Huikai Xie, G. Fedder, Huikai Xie, 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

Thermal assembly of polysilicon microactuators with narrow-gap electrostatic comb drive

G.K. Fedder, R.T. Howe, J.C. Chang, 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

Temperature control of CMOS micromachined sensors

G.K. Fedder, H. Lakdawala, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

CMOS-MEMS resonant mixer-filters

G.K. Fedder, 2005, IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest..

Modular MEMS Experimental Platform for Transmission Electron Microscopy

Z. Jandric, M. Ellis, C. Baur, 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.

CMOS-MEMS resonant RF mixer-filters

Fang Chen, T. Mukherjee, G.K. Fedder, 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

A SCS CMOS micromirror for optical coherence tomographic imaging

Huikai Xie, Yingtian Pan, G.K. Fedder, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

A copper CMOS-MEMS Z-axis gyroscope

Hao Luo, G. Fedder, L. Carley, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators

G.K. Fedder, C.-C. Lo, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

Micromachined high-Q inductors in 0.18 /spl mu/m Cu interconnect low-K CMOS

L.R. Carley, G.K. Fedder, S. Santhanam, 2001, Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (Cat. No.01CH37169).

Polymer wicking to mass load cantilevers for chemical gravimetric sensors

G. Fedder, S. Bedair, G.K. Fedder, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

Mechanical noise-limited CMOS-MEMS accelerometers

G. Fedder, G.K. Fedder, J.M. Tsai, 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

Active CMOS-MEMS AFM-like conductive probes for field-emission assisted nano-scale fabrication

Y. Zhang, J. Liu, G. Fedder, 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

CMOS-MEMS Capacitive Humidity Sensor

G. Fedder, N. Lazarus, G.K. Fedder, 2009, Journal of Microelectromechanical Systems.

CMOS MEMS oscillator for gas chemical detection

G. Fedder, S. Bedair, G.K. Fedder, 2004, Proceedings of IEEE Sensors, 2004..

BioImplantable Bone Stress Sensor

M.C. Miller, G.K. Fedder, J.F. Alfaro, 2005, 2005 IEEE Engineering in Medicine and Biology 27th Annual Conference.