K. Komatsu

Achromatic holographic lithography in the deep ultraviolet

Erik H. Anderson, Kazuhiko Komatsu, Henry I. Smith, 1988 .

Chemical nanoimprint lithography for step-and-repeat Si patterning

Kazuhiko Komatsu, Masatoshi Oda, Makoto Fukuda, 2007 .

X‐ray mask fabrication technology for 0.1 μm very large scale integrated circuits

Toshifumi Watanabe, S. Uchiyama, M. Oda, 1996 .

Overlay Accuracy Evaluation in Step-and-Repeat X-Ray Lithography

K. Deguchi, K. Komatsu, T. Horiuchi, 1988 .

Step-and-repeat X-ray/Photo hybrid lithography for 0.3-µm MOS devices

H. Namatsu, K. Deguchi, K. Komatsu, 1987, IEEE Transactions on Electron Devices.