Takeo Sato

ArF quarter-micron projection lithography with an aspherical lens system

Yoshiyuki Tani, M. Sasago, K. Koga, 1990 .

Performance of 0.2 μm optical lithography using KrF and ArF excimer laser sources

Masaru Sasago, Noboru Nomura, Masayuki Endo, 1993 .

Self-Absorption Correction Photon Activation Analysis for Low-Energy Photons in of Biological Materials Instrumental

Takeo Sato, Toyoaki Kato, K. Mori, 2006 .