Runzi Chang

Surface-micro-machined tunneling-based accelerometer

Runzi Chang, Min She, 2003, SPIE MOEMS-MEMS.

Integrated CMP Metrology and Modeling With Respect To Circuit Performance

Runzi Chang, 2004 .

Modeling metal dishing for interconnect optimization

Yu Cao, Runzi Chang, C.J. Spanos, 2003, IEEE International Electron Devices Meeting 2003.