Jun Fu

Critical Dimension and Real-Time Temperature Control for Warped Wafers

Weng Khuen Ho, Ming Chen, Arthur Tay, 2008 .

Critical Dimension Uniformity Via Real-Time Photoresist Thickness Control

Weng Khuen Ho, A. Tay, Ming Chen, 2007, IEEE Transactions on Semiconductor Manufacturing.

Critical dimension and real-time temperature control for warped wafers

Weng Khuen Ho, Ming Chen, W. Ho, 2008 .