J. T. C. Yeh

Emission spectra, surface quality, and mechanism of excimer laser etching of polyimide films

G. Koren, J. Yeh, G. Koren, 1984 .

Patterning of poly-para-xylylenes by reactive ion etching

J. Yeh, J. T. C. Yeh, K. R. Grebe, 1983 .

Emission spectra and etching of polymers and graphite irradiated by excimer lasers

G. Koren, J. Yeh, G. Koren, 1984 .