Yukinori Saito

Mass spectrometry of discharge products at 13.56 MHz in SF6 gas

Hidehiko Kobayashi, Eiichi Nishimura, Itsuo Ishikawa, 1994 .

Characteristics of 1 MHz Discharge in SF 6/O 2 Mixture in a Parallel-Plate System

Kenji Aoyagi, Itsuo Ishikawa, Yukinori Saito, 1997 .