Ravi Kiran Attota

Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy.

Ravi Kiran Attota, Peter Weck, John A Kramar, 2016, Optics express.

The limits of image-based optical metrology

Egon Marx, Heather Patrick, Bryan M. Barnes, 2006, SPIE Advanced Lithography.

Fidelity test for through-focus or volumetric type of optical imaging methods.

Ravi Kiran Attota, R. Attota, 2018, Optics express.

Through-focus scanning optical microscopy applications

Ravi Kiran Attota, 2018, Photonics Europe.

Scatterfield microscopy using conventional and back focal plane imaging with an engineered illumination field, ed. by C.N. Archie

Heather Patrick, Richard M. Silver, Ravi Kiran Attota, 2006 .

Nondestructive shape process monitoring of three-dimensional, high-aspect-ratio targets using through-focus scanning optical microscopy

Ravi Kiran Attota, Benjamin Bunday, Richard Allen, 2018, Measurement science & technology.

Calibrating optical overlay measurements

Richard M. Silver, Benjamin Bunday, Ravi Kiran Attota, 2006, SPIE Advanced Lithography.