J. Segovia-Fernandez

High power and low temperature coefficient of frequency oscillator based on a fully anchored and oxide compensated ALN contour-mode MEMS resonator

A. Tazzoli, G. Piazza, V. Felmetsger, 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

Monolithic piezoelectric Aluminum Nitride MEMS-CMOS microphone

R. Amirtharajah, D. A. Horsley, S. Sonmezoglu, 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Reduction of anchor losses by etched slots in aluminum nitride contour mode resonators

G. Piazza, Cristian Cassella, A. Frangi, 2013, 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC).

Nonlinear lumped electrical model for contour mode AlN resonators

A. Tazzoli, G. Piazza, M. Rinaldi, 2011, 2011 IEEE International Ultrasonics Symposium.

Experimental study on the impact of anchor losses on the quality factor of contour mode AlN resonators

G. Piazza, C. Cassella, A. Frangi, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).