K. Henttinen

Through-Wafer Polysilicon Interconnect Fabrication with In-Situ Boron Doping

Tapani Vehmas, Hannu Luoto, Panu Pekko, 2005 .

Bonded thick film SOI with pre-etched cavities

Hannu Luoto, James Dekker, T. Suni, 2006 .

SOI Wafers with Buried Cavities

Hannu Luoto, James Dekker, Jari Mäkinen, 2005 .

Transfer of thin Si layers by cold and thermal ion cutting

Hannu Luoto, S. Karirinne, T. Suni, 2003 .

MEMS on cavity-SOI wafers

Hannu Luoto, James Dekker, T. Suni, 2007 .

Effects of Plasma Activation on Hydrophilic Bonding of Si and SiO2

T. Suni, Jari Mäkinen, Ilkka Suni, 2002 .