Atsunobu Une

发表

Oscillation-Speed-Control-Type Polishing with a Small Tool (3rd Report)

Atsunobu Une, Kenichiro Yoshitomi, Masaaki Mochida, 2004 .

THEORETICAL INVESTIGATION OF A NEW ROUND-OFF TRUING METHOD

Shigeki Okuyama, Takayuki Kitajima, Atsunobu Une, 1999 .

Study of the Warp Removal Process for a Thin Substrate: Development of a Correction Processing System Using a Freezing Pin Chuck

Atsunobu Une, Kenichiro Yoshitomi, A. Une, 2020, Int. J. Autom. Technol..

Soft-handed vacuum chuck

Atsunobu Une, Masatoshi Oda, Akinori Shibayama, 1994, Photomask and Next Generation Lithography Mask Technology.

Clamping Characteristic of Pin-type Vacuum Chuck (3rd Report). Contact between Pin Top and Wafer Back-surface.

Atsunobu Une, Masaaki Mochida, Shinsuke Matsui, 2001 .

Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control

Atsunobu Une, Kenichiro Yoshitomi, Masaaki Mochida, 2004 .

Method of measurement and / or adjustment of displacement of an object and apparatus for implementing such process

Masanori Suzuki, Atsunobu Une, Makoto Iki, 1987 .

A Vertical X-ray Stepper for SOR Lithography

Masanori Suzuki, Makoto Fukuda, Sunao Ishihara, 1991, J. Robotics Mechatronics.

Influence of wafer chucking on focus margin for resolving fine patterns in optical lithography

Atsunobu Une, Masaaki Mochida, Shinsuke Matsui, 2000 .

Study on the Round-off Truing using the Circular Motion of CNC Grinding Machine. Computer Simulation of the Truing Process.

Shigeki Okuyama, Takayuki Kitajima, Atsunobu Une, 1998 .

An optical‐heterodyne alignment technique for quarter‐micron x‐ray lithography

Atsunobu Une, Masanori Suzuki, 1989 .

A dual grating alignment technique for x‐ray lithography

Hiroo Kinoshita, Atsunobu Une, Makoto Iki, 1983 .

A Highly Accurate Stress Measurement System for Producing Precise X-Ray Masks

Hideo Yoshihara, Atsunobu Une, Masatoshi Oda, 1995 .