Masakazu Furukawa

Surface Wave Plasma Production Employing High-Permittivity Material for Microwave Window

Haruo Shindo, Keisuke Shinagawa, Kouta Kusaba, 2001 .

Reflow of PSG Layers by Halogen Lamp Short Duration Heating Technique

Tohru Hara, T. Hara, Masakazu Furukawa, 1984 .

Oxygen Microwave Plasma Density Enhancement by Surface Waves with a High-Permittivity Material Window

Haruo Shindo, Keisuke Shinagawa, Masakazu Furukawa, 1999 .

Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window.

Haruo Shindo, Keisuke Shinagawa, Kouta Kusaba, 2001 .

Production of Large-Diameter Microwave Plasma with a High-Permittivity Material Window

Haruo Shindo, Masakazu Furukawa, Katsufumi Kawamura, 1998 .