M. Sato

Anomalous Increase in Resistivity of Boron-Doped Silicon Film after Solid Phase Crystallization

T. Noguchi, Toshiharu Suzuki, K. Kawai, 2009 .

Estimation of plasma density distribution in IHC source by means of FEM calculation

M. Sato, H. Kawaguchi, M. Tsukihara, 2014, 2014 20th International Conference on Ion Implantation Technology (IIT).