G. Kerrien

Single-Shot Excimer Laser Annealing and In Process Ellipsometry Analysis for Ultra Shallow Junctions

C. Laviron, T. Noguchi, D. Zahorski, 2002 .

Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

C. Laviron, D. Zahorski, J. Santailler, 2003 .

Laser doping for microelectronics and microtechnology

Tarik Bourouina, Kuniyuki Kakushima, Elisabeth Dufour-Gergam, 2004, SPIE High-Power Laser Ablation.

Optical characterization of laser processed ultra-shallow junctions

C. Laviron, D. Zahorski, M. Semeria, 2003 .

Laser thermal processing using an optical coating for ultra shallow junction formation

C. Laviron, J. Santailler, T. Sarnet, 2004 .

Excimer laser thermal processing of ultra-shallow junction: laser pulse duration

C. Laviron, J. Santailler, T. Sarnet, 2004 .

Gas immersion laser doping (GILD) for ultra-shallow junction formation

C. Laviron, G. Kerrien, Jacques Boulmer, 2004 .

Fabrication of heavily boron doped mechanical resonators

H. Fujita, H. Kawakatsu, T. Bourouina, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).