Kuwayama Hideki

Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

Yoshida Takashi, Harada Kinji, Kuwayama Hideki, 1990 .

Various applications of resonant pressure sensor chip based on 3-D micromachining

Kyoichi Ikeda, Hidekazu Murayama, Harada Kinji, 1999 .