N. Ito

发表

Reduction of Particle Contamination in Plasma-Etching Equipment by Dehydration of Chamber Wall

N. Ito, T. Moriya, F. Uesugi, 2008 .

Capture of flaked particles during plasma etching by a negatively biased electrode

N. Ito, T. Moriya, F. Uesugi, 2004 .

Control of behavior of particles flaked off an anode in plasma etch-back equipment by bias electrode

N. Ito, T. Moriya, F. Uesugi, 2000, Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130).

Importance of nucleation in transformation of octacalcium phosphate to hydroxyapatite.

M. Yoshimura, N. Ito, M. Kamitakahara, 2014, Materials science & engineering. C, Materials for biological applications.

Hydrothermal synthesis and characterization of hydroxyapatite from octacalcium phosphate

N. Watanabe, N. Ito, M. Kamitakahara, 2010 .

Observation of Transformation Behavior of Octacalcium Phosphate to Hydroxyapatite

N. Ito, M. Kamitakahara, K. Ioku, 2012 .

Preparation and evaluation of spherical porous granules of octacalcium phosphate/hydroxyapatite as drug carriers in bone cancer treatment

N. Ito, M. Kamitakahara, K. Ioku, 2014 .

PREPARATION OF SPHERICAL GRANULES OF OCTACALCIUM PHOSPHATE FOR MEDICAL APPLICATION

N. Ito, M. Kamitakahara, K. Ioku, 2012 .

Hydrothermal synthesis of hydroxyapatite from octacalcium phosphate: Effect of hydrothermal temperature

N. Watanabe, N. Ito, M. Kamitakahara, 2009 .

Generation of positively charged particles at an anode and transport to device wafers in a real radio frequency plasma etching chamber for tungsten etch-back process

N. Ito, T. Moriya, F. Uesugi, 2000 .

Observation of the trajectories of particles in process equipment by an in situ monitoring system using a laser light scattering method

H. Doi, N. Ito, T. Moriya, 1998 .

Real-time monitoring of scattered laser light by a single particle of several tens of nanometers in the etching chamber in relation to its status with the equipment

Tsuyoshi Moriya, Hiroshi Doi, Fumihiko Uesugi, 1998 .