M. Wagner

发表

Konstantin Seibel, Markus Böhm, M. Böhm, 2000 .

M. Wagner, P. Dürr, U. Dauderstädt, 2008 .

M. Hillebrand, H. Keller, Michael Wagner, 1999 .

P. Dürr, M. Wagner, J. Heber, 2007, SPIE Photomask Technology.

D. Pahner, M. Wagner, A. Mai, 2011, 2011 International Students and Young Scientists Workshop "Photonics and Microsystems".

Harald Schenk, Michael Wagner, Ulrike Dauderstädt, 2011, MOEMS-MEMS.

A. Gehner, M. Wagner, H. Schenk, 2021, Micromachines.

Harald Schenk, Michael Wagner, Jörg Heber, 2015, Photonics West - Optoelectronic Materials and Devices.

B. Schneider, M. Wagner, M. Bohm, 2000, IEEE Journal of Solid-State Circuits.