Zhi Hua Chen

A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution

Xuezhong Wu, P. Dong, Yunfei Lv, 2012 .

A Novel Fabrication Process of Large Area Triangular Nanocavity Arrays by Bilayer Nanosphere Lithography

Xuezhong Wu, P. Dong, Jian Chen, 2012 .