J. Matsui

X-ray lithography for submicron device fabrication

M. Fukuma, K. Suzuki, K. Okada, 1986 .

High flatness mask for step and repeat x‐ray lithography

K. Suzuki, J. Matsui, 1986 .

SiN membrane masks for x‐ray lithography

K. Suzuki, J. Matsui, T. Torikai, 1982 .

MOS Device Fabrication Using X‐Ray Lithography

J. Matsui, K. Suzuki, T. Ono, 1981 .