Li Chen

Additive Processes for Semiconductors and Dielectric Materials

Robert C. Roberts, Christian A. Zorman, C. Zorman, 2011 .

A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD

Mehran Mehregany, Sang-Soo Noh, M. Mehregany, 2007 .

Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments

Robert G. Azevedo, Albert P. Pisano, Muthu B. J. Wijesundara, 2009 .

Development of Nickel Wire Bonding for High-Temperature Packaging of SiC Devices

M. Mehregany, C.A. Zorman, Li Chen, 2009, IEEE Transactions on Advanced Packaging.

A Silicon Carbide Capacitive Pressure Sensor for High Temperature and Harsh Environment Applications

M. Mehregany, M. Mehregany, Li Chen, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement

Mehran Mehregany, M. Mehregany, Li Chen, 2008 .

SILICON CARBIDE PRESSURE SENSORS AND INFRA-RED EMITTERS

Li Chen, Li Chen, 2008 .

Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning Forks

M. Mehregany, A. Pisano, M. Mehregany, 2012, Journal of Microelectromechanical Systems.