Michael H. Reilly

High-performance ZnO thin-film transistors on gate dielectrics grown by atomic layer deposition

Peter Francis Carcia, P. Carcia, M. Reilly, 2006 .

Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers

Peter Francis Carcia, P. Carcia, M. Reilly, 2010 .