Nobuhiro Miki

Low outgassing and anticorrosive metal surface treatment for ultrahigh vacuum equipment

Tadahiro Ohmi, Mizuho Morita, Yoshiyuki Nakahara, 1990 .

Etching Rate and Mechanism of Doped Oxide in Buffered Hydrogen Fluoride Solution

Masayuki Miyashita, Tadahiro Ohmi, Jun Takano, 1992 .

Advanced Fluorite Regeneration Technology to Recover Spent Fluoride Chemicals Drained from Semiconductor Manufacturing Process (Special Issue on Scientific ULSI Manufacturing Technology)

Tadahiro Ohmi, Nobuhiro Miki, Matagoro Maeno, 1996 .

Advanced Fluorite Regeneration Technology to Recover Spent Fluoride Chemicals Drained from Semi-conductor Manufacturing Process

Tadahiro Ohmi, Nobuhiro Miki, Matagoro Maeno, 1996 .