Saghir Munir

发表

Performance of an automatic algorithm for quantifying critical dimensions in actinic aerial images

Shad Hedges, Doug Uzzel, Mark Ma, 2013, Photomask Technology.

Lithography-based automation in the design of program defect masks

Edita Tejnil, Saghir Munir, George Vakanas, 2004, SPIE Advanced Lithography.

Control Techniques and Programming Issues for Time Delayed Internet Based Teleoperation

Wayne J. Book, Saghir Munir, 2003 .

RS-Mini: an enterprise class highly compact mask inspection defect management framework for the mask and wafer fab infrastructure

Saghir Munir, 2011, Advanced Lithography.

Performance and Evolution of Stationary Plasma Thruster Electric Propulsion for Large Communications Satellites

Saghir Munir, Jorge J Delgado, Ronald L. Corey, 2010 .

PRIMADONNA: a system for automated defect disposition of production masks using wafer lithography simulation

Chris A. Mack, Saghir Munir, Daniel J. Bald, 2002, Photomask Technology.

Image-based metrology software for analysis of features on masks and wafers

Vikram Tolani, Saghir Munir, Daniel J. Bald, 2004, SPIE Photomask Technology.

DIVAS: an integrated networked system for mask defect dispositioning and defect management

Vikram Tolani, Dan Bald, Saghir Munir, 2003, SPIE Advanced Lithography.

DIVAS: fully automated simulation based mask defect dispositioning and defect management system

Vikram Tolani, Dan Bald, Saghir Munir, 2004, SPIE Photomask Technology.

Automated Heuristic Defect Classification (AHDC) for haze-induced defect growth management and mask requalification

Saghir Munir, Gul Qidwai, 2012, Advanced Lithography.

RDMS: a Windows and tablet PC based reticle defect search database with AHDC for interconnected mask and wafer fabs

Saghir Munir, Gul Qidwai, 2012, Photomask Technology.