Ni Hu

A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography

K. Tsai, A. Tay, Ni Hu, 2006 .

Estimation of wafer warpage profile during thermal processing in microlithography

Weng Khuen Ho, XiaoQi Chen, Ni Hu, 2005 .

An In Situ Approach to Real-Time Spatial Control of Steady-State Wafer Temperature During Thermal Processing in Microlithography

Weng Khuen Ho, Ni Hu, A. Tay, 2007, IEEE Transactions on Semiconductor Manufacturing.

Real-time spatial control of photoresist development rate

Arthur Tay, Weng Khuen Ho, Kuen-Yu Tsai, 2007, SPIE Advanced Lithography.