J.L. Ebel

A Latching Capacitive RF MEMS Switch in a Thin Film Package

J.L. Ebel, R. Cortez, K.D. Leedy, 2006, 2006 IEEE MTT-S International Microwave Symposium Digest.

A highly manufacturable 0.2 /spl mu/m AlGaAs/InGaAs PHEMT fabricated using the single-layer integrated-metal FET (SLIMFET) process

J.L. Ebel, K. Nakano, J.K. Gillespie, 1995, GaAs IC Symposium IEEE Gallium Arsenide Integrated Circuit Symposium 17th Annual Technical Digest 1995.

Atomic layer deposition of Al/sub 2/O/sub 3//ZnO nano-scale films for gold RF MEMS

J.L. Ebel, R. Cortez, K.D. Leedy, 2004, 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).

Thin-Film Encapsulated RF MEMS Switches

J. Ebel, K. Leedy, R. Strawser, 2007, Journal of Microelectromechanical Systems.