D. Haefliger

An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool

Georg Schitter, Andreas Stemmer, Marc Muenchinger, 2003 .

Dry release of all-polymer structures

Anja Boisen, Maria Nordström, Peter Rasmussen, 2005 .

Structuring of aluminum films by laser-induced local oxidation in water

A. Stemmer, A. Stemmer, D. Haefliger, 2002 .

Self-actuated polymeric valve for autonomous sensing and mixing

A. Boisen, A. Boisen, R. Marie, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..