T. A. Harder

Parylene-pyrolyzed carbon for MEMS applications

Y. Tai, M. Liger, T. A. Harder, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

Yield strength of thin-film parylene-C

Y. Tai, C. Shih, T. A. Harder, 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003..

Residual stress in thin-film parylene-c

Qing He, Yu-Chong Tai, Chi-Yuan Shih, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

Yield strength of thin-film parylene-C

T. A. Harder, Y. C. Tai, C. Y. Shih, 2004 .

Yield strength of thin-film parylene-C

Y. Tai, C. Shih, T. A. Harder, 2004 .