B. Kang

Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics

B. Sahoo, S. Han, Nagendra Prasad Yerriboina, 2021 .

Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask

Han-Ku Cho, Seung-Ho Lee, Jinho Ahn, 2012 .

Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography

Min-Su Kim, M. Ramachandran, Jin-Goo Park, 2014 .

Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

B. Sahoo, K. Ando, Jin-Goo Park, 2021, Ultrasonics sonochemistry.

Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning.

Min-Su Kim, Jin-Goo Park, B. Kang, 2014, Ultrasonics sonochemistry.

Acoustic Cavitation Behavior in Isopropyl Alcohol Added Cleaning Solution

A. Busnaina, H. Sohn, J. Jeong, 2012 .

Acoustic power dependent detachment of PSL particles adhered to glass surfaces by dissolved gas and anionic surfactant in an ultrasonic field

B. Sahoo, Jin-Goo Park, Nagendra Prasad Yerriboina, 2023, Colloids and Surfaces A: Physicochemical and Engineering Aspects.

Development of CO2 gas cluster cleaning method and its characterization

Soon-Bark Kwon, Taesung Kim, Hoomi Choi, 2013 .