T. Kilper

Microcrystalline SiGe Absorber Layers in Thin-film Silicon Solar Cells

O. Sergeev, K. Maydell, P. Klement, 2014 .

Process control of high rate microcrystalline silicon based solar cell deposition by optical emission spectroscopy

B. Rech, T. Repmann, R. Carius, 2008 .

Microcrystalline silicon deposition: Process stability and process control

B. Rech, W. Kessels, L. Houben, 2007 .

Challenges in microcrystalline silicon based solar cell technology

Bernd Rech, M. N. van den Donker, Helmut Stiebig, 2006 .

A process for depositing microcrystalline silicon on a substrate

B. Rech, S. Schicho, T. Kilper, 2008 .

Up-scaling and optimization of thin-film solar cells and modules based on amorphous and microcrystalline silicon

B. Rech, H. Stiebig, T. Repmann, 2005, Conference Record of the Thirty-first IEEE Photovoltaic Specialists Conference, 2005..

Control of plasma process instabilities during thin silicon film deposition

W. Appenzeller, A. Gordijn, D. Hrunski, 2009 .

Oxygen and nitrogen impurities in microcrystalline silicon deposited under optimized conditions : Influence on material properties and solar cell performance

B. Rech, R. Schmitz, T. Merdzhanova, 2009 .

Impurities in thin-film silicon: influence on material properties and solar cell performance

M. Meier, H. Stiebig, T. Merdzhanova, 2012 .

Critical Concentrations of Atmospheric Contaminants in a-Si:H and μc-Si:H Solar Cells

H. Stiebig, T. Merdzhanova, J. Woerdenweber, 2010 .