Rafael Aldana

Model-based scanner tuning for process optimization

Xu Xie, Yu Cao, Venu Vellanki, 2011, European Mask and Lithography Conference.

Simulation-based pattern matching using scanner metrology and design data to reduce reliance on CD metrology

Anton Devilliers, Junwei Lu, Xu Xie, 2010, Advanced Lithography.

Sentieon DNA pipeline for variant detection - Software-only solution, over 20× faster than GATK 3.3 with identical results

Rafael Aldana, Jessica A. Weber, Brendan D. Gallagher, 2016 .

Simulation-based scanner tuning using FlexRay capability and scatterometry

Xu Xie, Rolf Seltmann, Paul van Adrichem, 2011, Advanced Lithography.

Photoelectronic analog-to-digital conversion using miniature electron optics: Basic design considerations

R. Fabian Pease, Rafael Aldana, R. Pease, 2003 .