Kenneth E. Hrdina

Measuring and tailoring CTE within ULE glass

Kenneth E. Hrdina, Bradford G. Ackerman, Andrew W. Fanning, 2003, SPIE Advanced Lithography.

Measuring CTE uniformity in ULE glass

Kenneth E. Hrdina, Bradford G. Ackerman, Andrew W. Fanning, 2003 .

Characterization and characteristics of a ULE glass tailored for EUVL needs

Kenneth E. Hrdina, Robert Sabia, Benjamin Zain Hanson, 2002, SPIE Advanced Lithography.

Development of Mask Materials for EUVL

Kenneth E. Hrdina, Bradford G. Ackerman, Christine E Heckle, 2002, Photomask Technology.

Measuring thermal expansion variations in ULE glass with interferometry

Kenneth E. Hrdina, Andrew W. Fanning, W. David Navan, 2004, SPIE Advanced Lithography.

An old material finds a new application

Kenneth E. Hrdina, Bradford G. Ackerman, Christine E Heckle, 2002 .