Bradford G. Ackerman

Measuring and tailoring CTE within ULE glass

Kenneth E. Hrdina, Bradford G. Ackerman, Andrew W. Fanning, 2003, SPIE Advanced Lithography.

Measuring CTE uniformity in ULE glass

Kenneth E. Hrdina, Bradford G. Ackerman, Andrew W. Fanning, 2003 .

Development of Mask Materials for EUVL

Kenneth E. Hrdina, Bradford G. Ackerman, Christine E Heckle, 2002, Photomask Technology.

An old material finds a new application

Kenneth E. Hrdina, Bradford G. Ackerman, Christine E Heckle, 2002 .