U. Baldenweg

Ultrasound-transducer using membrane resonators realized with bipolar IC technology

Oliver Brand, Henry Baltes, U. Baldenweg, 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

Thermally excited silicon oxide beam and bridge resonators in CMOS technology

Oliver Brand, Henry Baltes, U. Baldenweg, 1993 .