Y. Matsumoto

A monolithically integrated three-axis accelerometer using CMOS compatible stress-sensitive differential amplifiers

Makoto Ishida, Hidekuni Takao, M. Ishida, 1999 .

Anodic bonding for integrated capacitive sensors

Masayoshi Esashi, Y. Matsumoto, N. Ura, 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

One-Side-Electrode-Type Fluid-Based Inclinometer Combined With CMOS Circuitry

K. Nakamura, Y. Matsumoto, A. Bin Abd Manaf, 2007, 2007 IEEE Sensors.